An up-to-date guide to the theory and applications of RF MEMS.With detailed information about RF MEMS technology as well as itsreliability and applications, this is a comprehensive resource forprofessionals, researchers, and students alike. * Reviews RF MEMStechnologies * Illustrates new techniques that solve long-standingproblems associated with reliability and packaging * Provides theinformation needed to incorporate RF MEMS into commercial products* Describes current and future trends in RF MEMS, providingperspective on industry growth * Ideal for those studying orworking in RF and microwave circuits, systems, microfabrication andmanufacturing, production management and metrology, and performanceevaluation